论文部分内容阅读
本文介绍了电子背散射衍射接收装置,该装置的CCD以快速方式接收的灵敏度为5 m lux,积累方式接收的灵敏度为10μlux,,分辨率为512 dpi,扫描卡最高的分辨率为4 096×4 096。并成功地安装在北京有色金属研究总院JSM-840扫描电镜上。此系统设计合理、结构简单、操作方便安全。成功的编写了识别和标定电子背散射衍射花样的软件,可给出测试样品的电子图像、极图、反极图、取向图及微取向分布图(ODF)。
This article describes the electron backscatter diffraction receiving device, the CCD device to receive fast sensitivity of 5 m lux, the cumulative method of receiving sensitivity of 10μlux ,, resolution of 512 dpi, the highest resolution of the scanning card 4 096 × 4 096. And successfully installed in Beijing Nonferrous Metal Research Institute JSM-840 scanning electron microscope. The system design is reasonable, simple structure, easy and safe operation. Successful software for identifying and calibrating electron backscatter diffraction patterns has been developed to provide electronic images, polar maps, reverse polar maps, orientations and microdisagrence profiles (ODFs) of the test samples.