The development of the fast tool servo (FTS) for precision machining was investigated.The micron machining performance of a piezoelectric-assisted FTS on copper alloy was evaluated.The results indicate that the quality of the microstructure depends mainly on two important factors:the cutting speed (or spindle speed) and the driving frequency of the FTS.The excessive driving frequency increases the formation of burrs.The effect of the clearance angle of the diamond tool on the microstructure machining precision was also investigated. The development of the fast tool servo (FTS) for precision machining was investigated. The micron machining performance of a piezoelectric-assisted FTS on copper alloy was evaluated. The results indicate that the quality of the microstructure depends mainly on two important factors: the cutting speed (or spindle speed) and the driving frequency of the FTS. excessive driving frequency increases the formation of burrs. the effect of the clearance angle of the diamond tool on the microstructure machining precision was also investigated.