一、引言集成电路的历史,虽然只有20多年,但是集成电路的集成规模,却始终以惊人的速度发展,尤其在近10多年内,集成度以平均每三年提高四倍的速度增长。从1958年发明的仅有几个元件的第一块集成电路发展到目前,已能在一块芯片上集成上百万个元件。有人估计,到1990年,有可能达到每芯片1亿个元件的集成规模。 I. INTRODUCTION Although the history of integrated circuits was only over 20 years ago, the integrated scale of integrated circuits has always been growing at an alarming rate. In particular, in the past decade or so, the level of integration has increased at an average rate of four times every three years. From the first integrated circuit invented in 1958 to only a few components to the present, it is possible to integrate millions of components on a single chip. It is estimated that by 1990, it is possible to achieve an integration scale of 100 million components per chip.