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环境温度变化是影响夏克-哈特曼波前传感器(SHWS)测量精度的重要因素之一。采用Zemax软件热分析功能,分析了环境温度变化引起的微透镜阵列(MLA)变形及折射率变化、MLA和电荷耦合器件(CCD)间距变化以及球面波点源与SHWS间距变化对SHWS测量精度的影响。分析计算得出,环境温度变化引起的MLA和CCD间距变化是影响SHWS测量精度的主要因素,环境温度在21~24℃内每增加1℃,给测量结果带来的误差[均方根(RMS)]约为0.52nm。通过单模光纤衍射产生近于理想的球面波对SHWS测量精度进行实验验证,实验结果和仿真分析结果基本一致。
Ambient temperature variation is one of the important factors affecting the measurement accuracy of the Shack-Hartmann wavefront sensor (SHWS). The thermal analysis function of Zemax software was used to analyze the deformation and refractive index changes of microlens array (MLA) caused by environmental temperature changes, the variation of MLA and charge-coupled device (CCD) spacing and the variation of spherical wave point source and SHWS on SHWS measurement accuracy influences. The analysis and calculation result shows that the change of MLA and CCD distance caused by the change of ambient temperature is the main factor affecting the measurement accuracy of SHWS. The error (Rms [RMS] )] Is about 0.52 nm. The SHWS measurement accuracy is verified by the nearly perfect spherical wave generated by single-mode fiber diffraction. The experimental results are in good agreement with the simulation results.