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为实现热电式MEMS微波功率传感器与电容式MEMS微波功率传感器的兼容,得到一种性能优良的双通道MEMS微波功率传感器,需要对MEMS悬臂梁的匹配特性进行分析与设计。根据MEMS悬臂梁的一维集中参数模型,分析了MEMS悬臂梁的吸合电压,研究了MEMS悬臂梁的位移与电容的变化关系以及MEMS悬臂梁的谐振频率,得到了MEMS悬臂梁的匹配特性与MEMS悬臂梁高度的变化关系。实验结果表明,当MEMS悬臂梁的高度设计为10μm时,MEMS悬臂梁的谐振频率为16.13kHz,在8~12GHz频率范围内,回波损耗均小于-19dB。
In order to achieve the compatibility between the thermoelectric MEMS microwave power sensor and the capacitive MEMS microwave power sensor, a good performance dual-channel MEMS microwave power sensor is obtained, and the matching characteristic of the MEMS cantilever beam needs to be analyzed and designed. Based on the one-dimensional lumped parameter model of MEMS cantilever, the pull-in voltage of MEMS cantilever is analyzed. The relationship between the displacement of MEMS cantilever and the capacitance and the resonant frequency of MEMS cantilever are studied. MEMS cantilever height relationship. The experimental results show that the resonant frequency of the MEMS cantilever is 16.13 kHz when the height of the MEMS cantilever is designed to be 10 μm, and the return loss is less than -19 dB in the frequency range of 8 to 12 GHz.