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采用真空镀锡膜、锡膜氧化，浸泡掺杂的方法研制了掺ＭｇＯ的ＳｎＯ＿２薄膜气敏元件，在对乙醇、丙酮等八种气体的测试结果表明：ＭｇＯ－ＳｎＯ＿２元件提高了对乙醇的灵敏度和选择性，而对其余气体的气敏特性同未掺杂元件相类似。实验发现，随着浸泡液浓度的增大，元件对乙醇的灵敏度并不是单调地随之增大，而是出现了一个峰值。实验还发现经Ｍｇ（ＮＯ＿３）＿２溶液处理过的元件对乙醇的灵敏度与乙醇浓度之间的线性关系大大拓宽。在敏感机理方面，提出了流过元件电流Ｉ的公式，该公式可以较好地解释实验现象。利用化学方法在ＳｎＯ＿２薄膜中掺入ＭｇＯ，所制备的元件既克服了烧结型元件的缺点，又克服了薄膜元件物理方法掺杂时掺杂量难以控制的不足之处，为开发新型薄膜气敏元件作了一种尝试。
Adopting vacuum tin-plating film, tin oxide film and immersion-doping method, the MgO-doped SnO_2 thin film gas sensor was developed. The results showed that the MgO-SnO_2 element increased the sensitivity to ethanol And selectivity, while the gas sensitivity to the remaining gases is similar to undoped components. The experiment found that with the increase of the concentration of soaking solution, the sensitivity of the element to ethanol did not monotonically increase, but a peak appeared. The experiment also found that the linear relationship between ethanol sensitivity and ethanol concentration was greatly broadened by Mg (NO_3) _2 solution treated components. In terms of the sensitive mechanism, a formula for the current I flowing through the component is proposed, which can explain the experimental phenomena well. The chemical method is used to incorporate MgO into the SnO 2 thin film, which overcomes the shortcomings of the sintered component and overcomes the defects that the doping amount is difficult to be controlled when the physical component of the thin film component is doping. In order to develop a novel thin film gas sensor Component made an attempt.