以定齿偏置梳齿闭环电容加速度传感器为例,简述了其工作原理,建立了其力学模型。经过分析得到静电力、量程、稳定性、灵敏度等关键物理量的具体表达形式。研究结果表明,加速度传感器的性能和折叠梁的尺寸,检测质量块质量、极板面积、偏置电压、反馈电压等因素有关。本文的研究为电容加速度传感器的进一步优化设计奠定了坚实的理论基础。 Taking the tooth closed bias comb closed loop capacitive acceleration sensor as an example, its working principle is briefly described and its mechanical model is established. After analysis, we get the concrete expressions of the key physical quantities such as electrostatic force, range, stability, sensitivity and so on. The results show that the performance of the accelerometer is related to the dimensions of the folded beam, the mass of the proof mass, the plate area, the bias voltage and the feedback voltage. The research in this paper has laid a solid theoretical foundation for the further optimization design of the capacitive acceleration sensor.