SEM515、SEM525和SEM535是菲利浦电子光学仪器公司最近改制成的三种新型扫描电子显微镜,其中SEM525是特为一般材料工业、冶金实验室和半导体工业而设计的。由于它们的分辨率更高,低压性能更好,加上自动聚焦,像散的自动调节以及外部TV信号反馈等特性,不久就会取代现有的SEM505 The SEM515, SEM525 and SEM535 are three new scanning electron microscopes recently transformed by Philips Electronics Optical Instruments, of which the SEM525 is designed for the general materials industry, the metallurgical laboratory and the semiconductor industry. Due to their higher resolution, better low-voltage performance, along with autofocus, automatic adjustment of astigmatism, and external TV signal feedback, will soon replace the existing SEM505