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采用反应磁控溅射法制备Ag/TiO_2复合薄膜,利用X射线衍射、扫描电镜、透射电镜、X射线光电能谱和原子吸收光谱分析了不同实验参数对复合薄膜形貌和银离子溶解释放规律。研究结果表明随着氧气流量的加大,银纳米颗粒在薄膜体相和表面的团聚和不规则分布增加;表面缓冲层对银纳米颗粒的表面偏析现象和银离子释放速率的抑制作用有限;复合薄膜中银元素的含量则对薄膜形貌和银离子释放速率有较大影响,银含量越少,银离子释放速率越慢。综合性能分析认为在复合薄膜中银含量为9%时,银纳米颗粒在薄膜内的粒径分布较为均匀,银离子释放速率也最为缓慢。
Ag / TiO_2 composite films were prepared by reactive magnetron sputtering. The morphology and the release of silver ions were analyzed by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, X-ray photoelectron spectroscopy and atomic absorption spectroscopy . The results show that with the increase of oxygen flow rate, the aggregation and irregular distribution of silver nanoparticles on the bulk and surface of the film increase; the effect of the surface buffer layer on the surface segregation of silver nanoparticles and the inhibition of silver ion release rate is limited; The content of silver in the film has a great influence on the film morphology and the release rate of silver ions. The less the silver content, the slower the release rate of silver ions. The comprehensive performance analysis shows that when the silver content in the composite film is 9%, the distribution of silver nanoparticles in the film is more uniform and the release rate of silver ions is also the slowest.