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以无机盐ＳｎＣｌ２·２Ｈ２Ｏ，Ｙ（ＮＯ３）３·６Ｈ２Ｏ为原料，无水乙醇为溶剂，采用溶胶－凝胶工艺制备了Ｙ２Ｏ３掺杂的ＳｎＯ２薄膜．采用差热－失重分析研究了Ｙ２Ｏ３掺杂的ＳｎＯ２干凝胶粉末的热分解、晶化过程．研究了Ｙ２Ｏ３－ＳｎＯ２薄膜的电学和气敏性能．从实验中得到了Ｙ２Ｏ３掺杂份量对ＳｎＯ２薄膜电学及气敏性能的影响．实验表明Ｙ２Ｏ３掺杂的ＳｎＯ２薄膜在常温下对ＮＯｘ具有较好的灵敏度和选择性，并具有较好的响应恢复性能；在常温下对Ｈ２Ｓ气体也具有一定的灵敏度．
Y2O3 doped SnO2 thin films were prepared by sol-gel process using inorganic salts of SnCl2 · 2H2O, Y (NO3) 3 · 6H2O as raw materials and anhydrous ethanol as solvent. The thermal decomposition and crystallization of Y2O3 doped SnO2 xerogels were investigated by DTA-GC analysis. The electrical and gas sensitivities of Y2O3-SnO2 films were investigated. The influence of Y2O3 doping amount on the electrical and gas sensing properties of SnO2 thin films was obtained from the experiment. Experiments show that the Y2O3 doped SnO2 thin film has good sensitivity and selectivity to NOx at normal temperature, and has good response recovery performance; it also has certain sensitivity to H2S gas at normal temperature.