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介绍了毛细作用驱动的MEMS流体微器件自组装技术的研究和发展概况,并对组装中的自对准过程进行了模拟仿真。通过仿真模拟,证明即使在器件与衬底组装区域形状大小不同时,仍可能实现自对准。这说明自组装对组装器件和衬底粘合层的形状尺寸匹配精度的要求不苛刻。同一个衬底粘合层的版图将可能适用于具有不同尺寸粘合层的器件进行安装,反之拥有同样粘合层的器件则可能安装到不同的衬底中。这些结论有助于未来更合理地设计自组装系统。
The research and development of self-assembly technology of capillary-driven MEMS fluid micro-devices are introduced, and the self-alignment process in assembly is simulated. Simulation shows that self-alignment is possible even when the shape of the device and the substrate assembly area are different in size. This shows that self-assembly of the assembly device and substrate adhesive layer shape matching accuracy requirements are not harsh. The same substrate adhesive layer layout may be suitable for devices with different sizes of adhesive layers to be mounted, whereas devices with the same adhesive layer may be mounted into different substrates. These conclusions help to design a self-assembly system more reasonable in the future.