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用微机械加工的方法,可以制作超小型的高性能化学传感器和用作流量控制的微型阀.如果这些器件被集成在一块硅片上,就能制成非常小的常规化学分析系统.这种微型分析系统优点是灵敏度高,响应快,几乎有没死区,所需的采样量非常少.为了制作诸如流体注入分析器(FIA)这样完善的化学分析器单片集成系统,必须把微型泵和采样注入器造在硅片上.微型泵由一个压力执行器,二个逆止阀和一个由压力执行器驱动的薄膜片组成,这个结构如图1所示.逆止阀用多晶硅作为材料,磷硅玻璃(PSG)作为牺牲层,制造工艺和IC工艺完全兼容.
Micromachining allows the production of ultra-small, high-performance chemical sensors and flow-controlled microvalves that can be fabricated into very small, routine chemical analysis systems if they are integrated on a single piece of silicon. The advantages of a microanalysis system are its high sensitivity, fast response, almost no dead zone and very small sample volume required. To make a complete chemical analyzer monolithically integrated system such as a fluid injection analyzer (FIA), a micro pump And sampling injector made on silicon.The micro-pump consists of a pressure actuator, two check valves and a diaphragm driven by the pressure actuator composition, the structure shown in Figure 1. Check valve with polysilicon as a material , Phosphorosilicate glass (PSG) as a sacrificial layer, the manufacturing process and the IC process is fully compatible.