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介绍了一种应用激光平面干涉仪从入射面检测锥体棱镜直角误差的方法。棱镜被测角通过一个夹具被预置一个初始角,使射入棱镜内的测试平行光垂直于被测角棱,经被测直角的两个面反射后形成全反射光路,当射出的光与测试平行光重合时产生干涉,实现对锥体棱镜直角误差的测量。介绍了测量、干涉条纹图形分析和直角误差计算的方法,并与传统检测方法进行了比较。结果表明,该方法具有操作简单、测量准确、计算精度高等特点,适合于高精度锥体棱镜(α≤3″)的直角误差测量。
A method of detecting the right angle error of pyramid prism from the incident plane by laser plane interferometer is introduced. Prism angle measured by a fixture is preset an initial angle, so that the test light into the prism parallel to the measured angle of the measured edge, measured by the two sides of the right angle reflector to form a total reflection of the light path, when the light emitted and Test parallel light coincidence interference, to achieve right angle prism pyramid error measurement. The methods of measurement, interference fringe pattern analysis and right angle error calculation are introduced, and compared with the traditional detection methods. The results show that the proposed method is simple, accurate and accurate. It is suitable for the measurement of right angle error of high precision pyramid prism (α ≤ 3 ").