论文部分内容阅读
本文系笔者根据赴英国剑桥仪器公司参观、座谈EBMF6.5型电子束曝光机,并结合笔者的一点科研经验,重点剖析了EBMF6.5型机激光定位精密工作台系统独特的设计思想,并对结构和精度进行了系统的分析。
Based on the visit to EBMF6.5 electron beam exposure machine and the author’s experience in scientific research, this paper focuses on the unique design concept of the EBMF6.5 laser positioning precision workbench system. Structure and accuracy of a systematic analysis.