We present a theoretical calculation finding that a spectrum from ion beam analysis will change at different stopping cross sections. This is more visible at a deeper place in the sample. Helium-contained Ti films annealed at different temperatures are prepared to gain different stopping cross sections whereby the stopping cross section will change with the helium phase states and the pressure of helium bubbles. Then ion beam analysis is used to measure the concentration of helium. It is found that the concentration curve rises greatly after the sample is annealed at 673K which reflects the increasing size of the helium bubble. The results axe consistent with that of positron annihilation radiation spectra which are performed by using a changeable energy positron beam.