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试验了四十多种腐蚀剂,给出了其中十六种对InP(100)的腐蚀结果.有的已在InP Gunn器件制造工艺中应用.其中有六种未见报导.叙述了两种不同类型的化学反应,进一步分析了HClBr_2-C_2H_5OH同InP的化学作用.由实验结果和Arrhenius公式求得HCl对InP(100)的化学反应激活能E_a=14kcal/mole.文章最后讨论了InP材料的腐蚀机理、抛光原理及化学反应类型的控制.
More than forty etchants have been tested and sixteen of them have been shown to corrode InP (100), some of which have been used in the manufacturing of InP Gunn devices.6 Six of these have not been reported and two different types The chemical reaction of HClBr_2-C_2H_5OH with InP was further analyzed.The activation energy of HCl for chemical reaction of InP (100) was calculated by the experimental results and Arrhenius formula E_a = 14kcal / mole.The corrosion mechanism of InP was discussed finally , Polishing principle and type of chemical reaction control.