1.前言近来随着薄膜制造技术的发展,已开发出各种各样的薄膜应用于科研生产中。然而关于它的机械性能的评价却没有统一而有效的方法。因此考虑能否在低负荷下测量压入式硬度来间接地评价薄膜的强度,所以制造了这种新型硬度计。至今小负荷硬度计,通常使用显微维氏 1. Introduction Recently with the development of thin film manufacturing technology, has developed a wide range of films used in scientific research and production. However, there is no uniform and effective method for evaluating its mechanical properties. Therefore, considering the possibility of measuring the press-in hardness at a low load to indirectly evaluate the strength of the film, the new type of durometer was manufactured. So far a small load hardness, microscopic Vickers is commonly used