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从理论上计算出ZnO/蓝宝石结构声表面波相速度和机电耦合系数k2色散曲线。计算显示,在ZnO膜厚和声表面波器件波长之比h/λ=0.48时,IDT/ZnO(c面)/蓝宝石(c面)结构西沙瓦波1次模式的k2最大值为2.705%,理论声速为4 982m/s;在h/λ=0.3时,IDT/ZnO(a面)/蓝宝石(r面)结构西沙瓦波1次模式的k2最大值为4.34%,理论声速为5 509m/s。结果表明,IDT/ZnO(a面)/蓝宝石(r面)结构西沙瓦波1次模式的k2和声速较大,适于研制高频低损耗声表面波滤波器。
The phase velocity and the electromechanical coupling coefficient k2 dispersion curve of ZnO / sapphire structure were theoretically calculated. The results show that the k2 maximum value of the first-order mode of the IDT / ZnO (c-plane) / sapphire (c-plane) structure is 2.705% at a ratio of the ZnO film thickness to the surface acoustic wave device wavelength h / λ = The theoretical velocity of sound is 4 982m / s; for h / λ = 0.3, the k2 maxima of IDS / ZnO (a plane) / sapphire (r plane) s. The results show that the k2 and the velocity of sound in the first-order mode of IDS / ZnO (a-plane) / sapphire (r-plane) structure are suitable for the development of high frequency and low loss SAW filters.