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为使Ⅱ-Ⅵ族化合物ZnS薄膜具有可弯曲性,选用柔性的聚酰亚胺作为衬底材料,用射频磁控溅射法沉积ZnS薄膜,对所制备薄膜的结晶结构、组分和光学特性进行分析。实验结果表明,所制备薄膜为结晶态的闪锌矿ZnS结构,择优取向为(111)晶面,晶粒尺寸为25.6nm。薄膜组分接近化学计量比,并具有少量的S损失。薄膜在可见光区和近红外光区的平均透射率分别为82.0%和90.5%,透光特性良好。作为对比,在钠钙玻璃衬底上溅射的ZnS薄膜的结晶度高于聚酰亚胺衬底薄膜,但其透射率略低于柔性ZnS薄膜。实验结果表明了用磁控溅射法在柔性聚酰亚胺衬底上制备ZnS薄膜的可行性。
In order to make the ZnS thin film of Ⅱ-Ⅵ compound flexible, a flexible polyimide was chosen as the substrate material, and the ZnS thin film was deposited by RF magnetron sputtering. The crystal structure, composition and optical properties Analyze. The experimental results show that the prepared thin film is crystalline zinc blende ZnS structure, the preferred orientation of (111) crystal plane, the grain size of 25.6nm. The film composition is near stoichiometry with a small amount of S loss. The average transmittance of the film in the visible region and the near-infrared region was 82.0% and 90.5% respectively, and the light transmittance was good. In contrast, ZnS films sputtered on soda-lime glass substrates have higher crystallinity than polyimide substrate films but slightly lower transmissivity than flexible ZnS films. The experimental results show the feasibility of preparing ZnS films on flexible polyimide substrates by magnetron sputtering.