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以ＣｄＯ、ＳｎＯ＿２粉料作为靶，采用直流溅射方法制得ＣｄＯ、ＳｎＯ＿２双层薄膜元件，比较了ＣｄＯ／ＳｎＯ＿２与ＳｎＯ＿２／ＣｄＯ在性能方面的差异。认为ＣｄＯ／ＳｎＯ＿２的气敏性能较好，并初步探讨了工作温度和膜厚等因素对ＣｄＯ／ＳｎＯ＿２元件的电学性质及气敏特性的影响。
CdO and SnO_2 powders were used as targets, and CdO and SnO_2 double-layer thin film elements were prepared by DC sputtering method. The differences in properties between CdO / SnO_2 and SnO_2 / CdO were compared. The gas sensing performance of CdO / SnO_2 is considered to be good, and the influence of operating temperature and film thickness on the electrical properties and gas sensing properties of CdO / SnO_2 devices is also discussed.