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分析和讨论了激光反馈干涉现象 ,根据半导体激光器的反馈干涉理论 ,研究了反馈干涉模型及其信号的调制和解调方法 ,介绍了典型的传感应用。理论和实验表明 ,激光反馈干涉的理论不同于传统干涉 ,信号处理方法也有其特点。半导体激光器的光学反馈干涉系统具有结构简单、光路易准直、无需附加器件的特点 ,因而能够发展成小型、在线测量和过程控制的传感器 ,测量距离、位移和速度 ,在微机械、光学工程等领域具有应用前景。
The feedback interference phenomenon of laser is analyzed and discussed. According to the feedback interference theory of semiconductor laser, the modulation and demodulation method of feedback interference model and its signal are studied. A typical sensing application is introduced. Theoretical and experimental results show that the theory of laser feedback interference is different from traditional interference and the signal processing method has its own characteristics. The optical feedback interferometry system of semiconductor lasers has the advantages of simple structure, easy collimation of optical path and no additional components, so it can be developed into small, on-line measurement and process control sensors to measure distance, displacement and velocity. In micro-mechanics, optical engineering, etc. The field has the application prospect.