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采用多级激光扩束获得大面积的均匀光场分布,利用相干刻蚀(IL)技术,制作了大面积(3.23cm2)的二维(2D)周期阵列结构,如光栅和栅格,并以此阵列制备出空间周期为300nm的金属Ag、Au和磁性材料Ni的点阵结构。
A large area uniform light field distribution is obtained by multi-stage laser beam expander. Two-dimensional (2D) periodic array structures of large area (3.23cm2), such as grating and grid, are fabricated by coherence lithography (IL) The array prepared a lattice structure of metal Ag, Au and magnetic material Ni with a space period of 300 nm.