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采用溶胶-凝胶工艺，将LiCl湿敏组元复合到SiO2-Al2O3玻璃先驱体中，用提拉法镀膜，经过适当的热处理，可以获得具有纳米结构和良好湿敏特性的LiCl／玻璃基薄膜。湿敏特性研究表明该类薄膜制得的传感器可在全湿范围内实现对湿度的测量。
The LiCl / glass-based thin film with nanostructures and good hygroscopic properties can be obtained by the sol-gel process after the LiCl wet-type components are compounded into the precursor of SiO2-Al2O3 glass by Czochralski method. . Humidity-sensitive characterization studies have shown that sensors made of this type of film can measure humidity over a full wet range.