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实验对微氮硅单晶进行了不同温度、时间、时序的热处理研究，着重调查了硅晶体中氮杂质浓度在热处理时的变化．实验指出，热处理时氛浓度的下降取决于样品热历史，热处理温度及其它杂质的影响，实验发现微氮样品高温热处理时，氮浓度消失，低温再退火时氮浓度重新回升，以及碳杂质抑制氮浓度下降的新事实，并结合红外吸收光谱的研究，提出微氮硅单晶中存在稳定性不同的二种氧氮复合体的观点．
Experiments were carried out on the heat treatment of different temperatures, time and sequence of micro-nitrogen single crystal, focusing on investigating changes in the concentration of nitrogen impurities in the silicon crystal during heat treatment. The experimental results show that the decrease of the atmospheric concentration during the heat treatment depends on the thermal history of the sample, the temperature of the heat treatment and other impurities. The results show that the concentration of nitrogen disappears, the nitrogen concentration re-rises after annealing at low temperature, and the carbon impurity inhibits nitrogen Concentration of the new facts, combined with the infrared absorption spectroscopy study put forward the micro-nitrogen single crystal in the presence of two different stability of oxygen and nitrogen complex point of view.