α能损法测量靶膜的厚度是通过测量穿过薄膜的粒子能量的变化实现膜厚的测量。一束单能的α粒子穿过一定厚度的薄膜后由于能量损失的歧离效应会使能量有一定展宽,但中心能量是通过α能谱的峰位确定的,因此,用α粒子测量薄膜厚度有更小的测量误差。同时,这是一种无损的测量方法,采用计算机控制,方便易用。 The α-loss method measures the thickness of the target film by measuring the change in the energy of the particles passing through the film. A bunch of single-energy α particles through a certain thickness of the film after the energy loss due to the effect of the variance will make some energy to broaden, but the central energy is determined by the alpha spectrum peak position, therefore, with the alpha particle measurement of film thickness There is a smaller measurement error. At the same time, this is a nondestructive measurement method that uses computer control for ease of use.