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JS—3型精缩机是在JS—2精缩机成功地应用了光栅定位的基础上,为适应中、大规模象成电路制版需要而研制的。它保持了Ⅱ型机的基本方案,但在整机功能上除了可以进行固定程序拍版,还增加了选择程序拍版功能。这样可以为自动光刻制作对位标记、拼图、制备异图掩膜版等等。并采用了行进式曝光,大大地提高了制版效率。
JS-3-type sizing machine is based on JS-2’s successful application of grating positioning, in order to adapt to large-scale imaging circuit board into the needs of the development. It maintains the basic program of type Ⅱ machine, but in addition to the function of the whole machine can be fixed version of the film, but also increased the choice of procedures version of the film. This can be used for automatic lithography alignment mark, puzzle, the preparation of different mask version and so on. And the use of a progressive exposure, greatly improving the platemaking efficiency.