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本文研究了双靶射频磁控溅射装置,能重复制作明亮的 ZnS∶TbOF薄膜电致发光绿色显示板。ZnS 和 Tb 由各自的靶进行溅射,基片在这两靶间运动。这种设计导致 ZnS 厚度及 Tb 掺杂浓度优良的可控性。已研制出 TbOF 靶以形成有效的 TbOF 络合物中心来提高亮度,并采用 Ar/He 混合气避免了对 ZnS 基质的溅射损伤。已研制成640×200薄膜电致发光绿色显示板样机,证明了本装置的大面积生产能力。根据 ZnS∶TbOF 和 ZnS∶Mn 激活层横向排列,也已制成薄膜电致发光多色显示板。
In this paper, a dual-target RF magnetron sputtering device is studied, which can produce bright green ZnS:TbOF thin film electroluminescent display panel repeatedly. ZnS and Tb are sputtered from their respective targets and the substrate is moved between these two targets. This design leads to excellent controllability of ZnS thickness and Tb doping concentration. The TbOF target has been developed to form an effective TbOF complex center for increased brightness and the Ar / He gas mixture is used to avoid sputtering damage to the ZnS substrate. Has developed a 640 × 200 thin-film electroluminescent green panel prototype, proved the device’s large-area production capacity. Thin film electroluminescent multi-color display panels have also been made according to the lateral arrangement of the active layers ZnS: TbOF and ZnS: Mn.