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设计了一种单片集成的光电接收机芯片.在同一衬底上制作了基于同一工艺的光电二极管与接收机电路,以消除混合集成引入的寄生影响.这种单片集成接收机采用了先进的深亚微米MS/RF(混合信号/射频)CMOS工艺,利用这种新型工艺提供的新技术对原有光电二极管进行了改进,使其部分性能显著改善,并对整个光电集成芯片性能的提高有所帮助.
A monolithically integrated optoelectronic receiver chip is designed on the same substrate with a photodiode and receiver circuit based on the same process to eliminate the parasitic effects introduced by the hybrid integration.The monolithic integrated receiver uses an advanced Of the deep sub-micron MS / RF (mixed-signal / radio frequency) CMOS process, using the new technology provided by this new technology to improve the original photodiode, some of its performance significantly improved, and improve the performance of the entire optoelectronic integrated chip Help