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开关是微波信号变换的关键元件。和传统的半导体开关相比 ,射频微机电系统 (RFMEMS)开关具有优良的高频特性和固有的重量轻、尺寸小、低功耗等优点 ,而且其制作工艺和传统的 CMOS工艺相兼容。本文较为详细地论述了串联悬臂梁开关、并联悬臂梁开关和膜开关的工作原理及典型的性能参数。由于其优越的微波特性 ,MEMS开关已在许多电路和系统中 ,包括微波前端电路、数字电容器组和移相网络中得到应用
Switch is a key component of microwave signal conversion. Compared with the traditional semiconductor switches, RFMEMS switches have excellent high-frequency characteristics and inherent advantages of light weight, small size and low power consumption, and their fabrication process is compatible with traditional CMOS processes. This article discusses in more detail the working principle and typical performance parameters of series cantilever switch, parallel cantilever switch and membrane switch. MEMS switches have found application in many circuits and systems, including microwave front end circuits, digital capacitor banks and phase shifting networks due to their superior microwave characteristics