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从七十年代起,国外对固体表面的研究极为重视,随着电子、离子光学技术、扫描及辐射探测技术的发展,创造了多种表面物理分析仪器,并开展了大量的研究工作.本文简要介绍其中的一种仪器——离子探针表面分析仪及其在金属材料研究中的应用. 一分析原理当用具有一定能量的入射离子与固体表面原子相碰撞时,入射离子由于与固体原子之间的非弹性散射作用而损失能量,同时,样品表面的原子发生溅射及离化,一次离子轰击样品表面产生的信息如图1所示.其中,正负离子溅射出来的量只占整个溅射总量的很
Since the seventies, foreign countries attach great importance to the study of solid surfaces. With the development of electron, ion optics, scanning and radiation detection technologies, a variety of surface physics analysis instruments have been created and a great deal of research work has been done. Introduction of one of the instruments - ion probe surface analyzer and its application in the study of metal materials.Analysis principle When using a certain energy of incident ions collide with the solid surface atoms, the incident ion due to solid atoms Inelastic scattering loss of energy between the same time, the sample surface atoms sputtering and ionization, ion bombardment sample surface generated information shown in Figure 1. Among them, the amount of positive and negative ions sputtered only the entire splash Shoot a lot of total