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新开发类金刚石(DLC)砂轮所用的DLC纤维是涂敷DLC膜的铝板经压延机单向压延而成的,DLC膜断裂成纤维状,而且纤维的方向保持一致,经几层叠合,由结合剂固结并烧结制成DLC纤维砂瓦,用其制作出杯形砂轮。然后,利用这种砂轮进行硅片、石英、SKD-11淬硬钢的磨削。硅片的磨削结果表明,加工表面粗糙度可达Ry=15nm(Ra=2nm)。
The newly developed DLC diamond wheel used in DLC fiber is DLC film coated aluminum sheet by calender uniaxial rolling, DLC film broken into fibrous, and the direction of the fiber to maintain the same, laminated by several layers, by the combination of Agent consolidation and sintering made DLC fiber sand tile, with its production of cup-shaped wheel. Then, using this wheel for silicon, quartz, SKD-11 hardened steel grinding. Grinding results show that the wafer surface roughness of up to Ry = 15nm (Ra = 2nm).