论文部分内容阅读
By measuring the effects of halogen concentration on the lifetime.ofKrF excimer laser,the impurities affecting on the laser output performance areanalysed.The experimental results also show that the degration of halogen concentrationis related to the laser resonator conditions.
By measuring the effects of halogen concentration on the lifetime. Of KrF excimer laser, the impurities affecting on the laser output performance arealyzed. The experimental results also show that the degration of halogen concentration is related to the laser resonator conditions.