旋转CVI快速沉积热解碳基体

来源 :硅酸盐学报 | 被引量 : 0次 | 上传用户:juguoxianzhe
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采用一种新的CVI工艺 (旋转CVI)进行了二维碳布沉积热解碳基体的实验研究 .通过实验优化工艺参数 ,在低压 ( 5kPa)、高温( 1 1 0 0℃ )、体积分数为 62 .5%的C3H6 与 3 .5mm·min- 1的碳布旋转线速度条件下 ,获得了微观孔隙中 0 .2 5μm·h- 1的热解碳沉积速度、约 7%的C3H6 转化率与理想的热解碳基体形貌 .分析了旋转CVI工艺中沉积温度和C3H6 浓度等分别对沉积速度、热解碳基体形貌及C3H6 转化率的影响 . A new CVI process (rotating CVI) was used to investigate the carbon matrix pyrolytic carbon substrate by two-dimensional carbon cloth deposition.According to the experimental optimization of the process parameters, under the conditions of low pressure (5kPa), high temperature (1100 ℃), volume fraction 62.5% C3H6 and 3.5mm · min-1 carbon cloth rotational speed conditions, obtained in the micro-pores pyrolytic carbon deposition rate of 0. 25μm · h-1, about 7% conversion rate of C3H6 And ideal pyrolytic carbon matrix morphology.The effects of deposition temperature and C3H6 concentration on the deposition rate, pyrolytic carbon matrix morphology and C3H6 conversion were analyzed respectively.
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