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表面轮廓的测量可以评定零件表面的光滑程度,为了实现高精度测量,提出了应用电子直接调制激光束的频率和外差相干的方法对表面轮廓进行测量。采用差动多普勒的测量原理,实现数字测量及光路补偿;电子直接调制激光束频率的技术减小了系统体积,降低了成本;光纤传输提高了抗干扰的能力;测量信号的跟踪放大,提高了分辨率。通过电路调试并对产生误差的项进行分析补偿。实验表明,该技术的测量不确定度小于0.1%。
The measurement of the surface profile can measure the smoothness of the surface of the part. In order to achieve high-precision measurement, the method of measuring the surface profile by using the method of electron direct modulation of the laser beam frequency and heterodyne is proposed. Using differential Doppler measurement principle, to achieve digital measurement and optical path compensation; electron direct modulation of laser beam frequency technology to reduce system size and reduce costs; optical fiber transmission to improve the ability of anti-interference; measurement signal tracking amplification, Improved resolution. Through the circuit debugging and analysis of the error compensation items. Experiments show that the measurement uncertainty of this technique is less than 0.1%.