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利用原子力显微镜和掠入射X射线散射技术研究了6061Al合金等离子体离子注氮表面的粗糙度和标度行为.研究结果指出,注氮初期,表面粗糙度逐渐下降;当离子注入时间较长时,表面粗糙度随注入时间的延长而逐渐增加;在远离平衡的条件下,材料的形成机制可通过分形理论进行研究.长时间离子注氮表面具有明显的分形特征,利用所得到的静态标度指数、生长指数和动态标度指数讨论了6061Al合金离子注氮表面的标度行为.
The atomic force microscopy and grazing incidence X-ray scattering technique were used to study the roughness and scaling behavior of ion-implanted surfaces of 6061Al alloy plasma. The results show that the surface roughness gradually decreases at the initial stage of nitrogen injection. When the ion implantation time is longer, The surface roughness gradually increases with the injection time, and under the condition of away from equilibrium, the formation mechanism of the material can be studied by the fractal theory.The long-time plasma nitrogen injection surface has obvious fractal characteristics, and the obtained static scale index , Growth index and dynamic scaling index to discuss the scaling behavior of 6061Al alloy ion-implanted nitrogen surface.