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本文叙述了采用金属有机物钛酸四乙酯(Ti[OC2H5]4取代四氯化钛,运用PCVD外加热法沉积Ti(CN)涂层,并对涂层进行了X射线衍射(XRD)、扫描电镜(SEM)、X光电子(XPS)分析,其显微硬度可达到1600kg/mm2,膜层结构仍为柱状晶
In this paper, Ti (OC 2 H 5] 4 was substituted for titanium tetrachloride and the Ti (CN) coating was deposited by PCVD. The XRD and scanning Electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) analysis, the microhardness can reach 1600kg / mm2, the film structure is still columnar crystal