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本文叙述了采用金属有机物钛酸四乙酯（Ｔｉ［ＯＣ２Ｈ５］４取代四氯化钛，运用ＰＣＶＤ外加热法沉积Ｔｉ（ＣＮ）涂层，并对涂层进行了Ｘ射线衍射（ＸＲＤ）、扫描电镜（ＳＥＭ）、Ｘ光电子（ＸＰＳ）分析，其显微硬度可达到１６００ｋｇ／ｍｍ２，膜层结构仍为柱状晶
In this paper, Ti (OC 2 H 5] 4 was substituted for titanium tetrachloride and the Ti (CN) coating was deposited by PCVD. The XRD and scanning Electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) analysis, the microhardness can reach 1600kg / mm2, the film structure is still columnar crystal