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利用非对称双极脉冲磁控溅射制备了不用Co-La掺杂量的Ti-Co-La-N纳米复合薄膜。分别用扫描电子显微镜、X射线衍射、纳米压痕仪、划痕仪以及摩擦磨损仪研究了薄膜的表面形貌、结合力、显微硬度和摩擦学性能。结果表明:复合薄膜主要有TiN相、Co2N相和LaN相组成;复合膜的纤维硬度达到14.61GPa,低于TiN的显微硬度;复合薄膜的显微硬度和结合力都随着Co-La掺杂量的增加而降低;在高速钢基体上复合薄膜的摩擦系数达到了0.6。
Ti-Co-La-N nanocomposite films without Co-La doping were prepared by asymmetric bipolar pulsed magnetron sputtering. The surface morphology, cohesion, microhardness and tribological properties of the films were investigated by scanning electron microscopy, X-ray diffraction, nanoindentation, scratch tester and tribometer respectively. The results show that the composite films mainly consist of TiN phase, Co2N phase and LaN phase. The fiber hardness of the composite film reaches 14.61GPa, which is lower than the microhardness of TiN. The microhardness and cohesion of the composite films increase with the Co-La content The miscellaneous quantity increases and decreases; The friction coefficient of the composite film on the high-speed steel substrate reaches 0.6.