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在真空炉内以石墨为电极,利用空心阴极辉光放电在20CrNiMo上成功地沉积了类金刚石(Diamond-like carbon,DLC)薄膜,利用激光拉曼(Raman)光谱分析了所制备DLC薄膜的结构;利用原子力显微镜(AFM)分析了DLC薄膜的表面形貌;利用划痕仪测量了DLC薄膜与基体的结合力并用扫描电子显微镜(SEM)观察了划痕形貌;利用球-盘摩擦磨损实验仪对DLC薄膜的耐磨性能进行了研究。结果表明:在本实验工艺条件下沉积的类金刚石薄膜厚度约为0.6μm,薄膜均匀且致密,表面粗糙度Ra为7～8 nm。类金刚石薄膜与基体结合较紧密,临界载荷达到52 N。DLC薄膜具有优良的减摩性,20CrNiMo表面沉积DLC薄膜后摩擦系数为0.15,较20CrNiMo基体的摩擦系数0.50明显减小,耐磨性能得到提高。
A diamond-like carbon (DLC) thin film was successfully deposited on 20CrNiMo by hollow cathode glow discharge in a vacuum furnace with graphite as electrode. The structure of the prepared DLC thin film was analyzed by laser Raman spectroscopy The surface morphology of DLC films was analyzed by atomic force microscopy (AFM). The adhesion of DLC film to matrix was measured by a scratch tester and the scratch morphology was observed by scanning electron microscopy (SEM). The ball-plate friction and wear test DLC film wear resistance of the instrument was studied. The results show that the thickness of diamond-like carbon film deposited in this experiment is about 0.6μm, the film is uniform and dense, and the surface roughness Ra is 7 ~ 8 nm. Diamond-like carbon film is more tightly bonded to the substrate, with a critical load of 52 N. DLC film has excellent friction reducing property. The friction coefficient of DLC film deposited on 20CrNiMo surface is 0.15, which is obviously lower than that of 20CrNiMo matrix, and the wear resistance can be improved.