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为用现代表面科学技术研究金属氧化物催化剂，在Pt（111）上于超高真空系统中原位蒸镀制备了NbO、NbO2、NbO2、单晶薄膜（＞2nm）．通过AES、ISS、LEED、ILS等手段研究了单晶薄膜的成长模式、化学计量和几何结构．表明通过选择合适的废物和控制制备条件，可制备出确定结构的金属氧化物单晶薄膜表面作为体相氧化物催化剂的模型表面．这种方法克服了电子能谱技术研究金属氧化物表面的困难，为研究金属氧化物催化剂的表面化学物理性质提供了方法．
In order to study metal oxide catalysts using modern surface science and technology, NbO, NbO2, NbO2 and single crystal thin films (> 2 nm) were prepared by in-situ evaporation on Pt (111) in an ultra-high vacuum system. The growth mode, stoichiometry and geometry of single crystal films were studied by means of AES, ISS, LEED and ILS. It is shown that by selecting the appropriate waste and controlling the preparation conditions, a well-defined metal oxide monocrystalline film surface can be prepared as the model surface of the bulk oxide catalyst. This method overcomes the difficulties of electron spectroscopy in the study of metal oxide surfaces and provides a method for studying the surface chemical and physical properties of metal oxide catalysts.