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Hydrogen and Ozone SAW Based Gas Sensors with RF Magnetron Sputtered InO_x and Electron Beam Evapora
[期刊论文] 作者：A.C.Fechete,A.Wisitsora-at,W.Wlodarskil,K.Kalantar-zadeh,S.Kandasamy,A.S.Holland,,
来源：稀有金属材料与工程 年份：2006
Layered Surface Acoustic Wave (SAW) devices with an InO_x/SiN_u/36°YX LiTaO_3 structure were investigated for sensing low concentrations of hydrogen (H_2) and...
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