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Fast reactive feedback process control using a chalcogen pulsed cracker effusion valve for industria
[会议论文] 作者：Iván Fernández-MARTiNEZ,Fernando BRIONES,Victor Bellido-GONZ(A)LEZ,Ambi(o)rn WENNBERG,Marcos PENEDO,Benoit,
来源：SNEC 第七届(2013)国际太阳能产业及光伏工程(上海)论坛 年份：2013
This paper shows a fast process control for reactive deposition of semiconductor chalcogen compounds,such as CIG(S,Se) absorbers and S-based buffer layers (Indium or Zinc Sulphides).A Plasma Emission...
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