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,Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc
[期刊论文] 作者：Bin Han,Ze-Song Wang,D.Neena,Bao-Zhu Lin,Bing Yang,Chuan-Sheng Liu,De-Jun Fu,,
来源：Nuclear Science and Techniques 年份：2017
TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C_2H_2 and N_2atmosp~here. Their structure and...
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