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[期刊论文] 作者：LIN ChiiRuey,LIU ShinHwa,LIOU WangJeng,CHANG ChienKuo,,
来源：Science China(Physics,Mechanics & Astronomy) 年份：2012
Hydrogen-free diamond-like carbon(DLC) thin films were deposited at low temperature(less than 100°C) by an RF magnetron sputtering facility.DLC films have the...
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