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PIC-integrable,uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiN stress
[期刊论文] 作者：YIDING LIN,DANHAO MA,KWANG HONG LEE,RUI-TAO WEN,GOVINDO SYARANAMUAL,LIONEL CKIMERLING,CHUAN SENG TAN,,
来源：光子学研究:英文版 年份：2021
Mechanical strain engineering has been promising for many integrated photonic applications. However,for the engineering of a material electronic bandgap,a trade...
[期刊论文] 作者：Wang,Wardhana Aji Sasangka,Kenneth Eng Kian Lee,Soo Jin Chua,Jurgen Michel,Eugene Fitzgerald,Chuan Seng Tan,
来源：半导体学报（英文版） 年份：2021
The heterogeneous integration of Ⅲ-Ⅴ devices with Si-CMOS on a common Si platform has shown great promise in the new generations of electrical and optical sys...
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