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[期刊论文] 作者:Le-Min Zhang,Bin-Bin Jiao,Shi-Chang Yun,Yan-Mei Kong,Chih-Wei Ku,Da-Peng Chen, 来源:中国物理快报(英文版) 年份:2017
We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal ox...
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