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[会议论文] 作者：DR McKenzie,MMM Bilek,CT Tran,EA Kosobrodova,AV Kondyurin,EA Wakelin,
来源：13th Asia-Pacific Conference on Plasma Science and Technolog 年份：2016
In Plasma Immersion Ion Implantation (PⅢ) a bias voltage is applied to an object immersed in a plasma,subjecting it to ion bombardment.PⅢ creates active radicals in the sub surface region of polymers....
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