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[会议论文] 作者：Feng ZHANG,Fukai SHAN,
来源：Taishan Academic Forum on Graphene Nanomaterials and Biomedi 年份：2014
Hafnium oxide (HfO2) dielectric films were grown on heavily-doped silicon (100) substrates by sol-gel process.Hafnium chloride (HfCl4) was used as precursor mat...
[会议论文] 作者：Feng XU,Fukai SHAN,Guoxia LIU,
来源：Taishan Academic Forum on Graphene Nanomaterials and Biomedi 年份：2014
Yttrium oxide (Y2O3) dielectric films were grown on heavily-doped silicon (100) substrates by sol-gel process.Yttrium nitrate (Y(NO3)3·6H2O) was used as precur...
[会议论文] 作者：Jianmin Yu,Ao Liu,Guoxia Liu,Fukai Shan,
来源：第二十届全国半导体物理学术会议 年份：2015
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[会议论文] 作者：You Meng,Fukai Shan,Ao Liu,Guoxia Liu,Byoungchul Shin,
来源：第二十届全国半导体物理学术会议 年份：2015
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