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PIC-integrable,uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiN stress
[期刊论文] 作者：YIDING LIN,DANHAO MA,KWANG HONG LEE,RUI-TAO WEN,GOVINDO SYARANAMUAL,LIONEL CKIMERLING,CHUAN SENG TAN,,
来源：光子学研究:英文版 年份：2021
Mechanical strain engineering has been promising for many integrated photonic applications. However,for the engineering of a material electronic bandgap,a trade...
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