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[会议论文] 作者：Tianchun Ye,Huilong Zhu,Huaxiang Yin,Jun Luo,Hong Yang,Chunlong Li,Tao Yang,Hushan Cui,Jianfeng Gao,Guilei Wang,
来源：2015 Shanghai Thin Film Conference(2015上海薄膜国际会议) 年份：2015
In this talk,processing challenges of CMOS integration of FinFETs with all-last gate stacks and solutions by using novel materials are presented.It is found tha...
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