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Large-area ECR plasma generation by using a permanent magnets-embedded Lisitano antenna for the depo
[会议论文] 作者：Jang,H.J. You,Y.H. Jung,B.J. Lee,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In order to deposit Cu seed layer on ultra large scale integration (ULSI) devices,a new large-area ((○)278,378mm) electron cyclotron resonance (ECR) plasma has been generated by using a permanent magn...
[会议论文] 作者：H.J. You,S.O. Jang,Y.H. Jung,B.J. Lee,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Hydrogen was produced by the direct dissociation of water vapor,i.e.,splitting water molecules by the electrons in a water plasma,at low pressure (＜10～50 Torr) using a microwave plasma discharge....
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